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Euroasian Journal of Semiconductors Science and Engineering

Euroasian Journal of Semiconductors Science and Engineering

Abstract

The research article reports the phenomenon of self-organized assembly of doped nickel atoms in silicon sample at certain thermodynamic conditions. The author reveal that the concentration and profile of distribution of micro-scale particles in the silicon matrix is essentially uniform. It was found, that in the course of additional annealing the self-organization of micro-particles of impurity eventually occurs

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