In this study presents results of a study of the photoelectric properties of high-efficiency heterostructure solar cells fabricated by the PECVD method. It was shown that as a result of texturing, effective passivation of the surface, optimization of the quality of a-Si:H layers, transparent conductive and current-collecting metal grid contacts on the surface of the silicon substrate, HIT solar cells were produced with an efficiency of 22.9%.
Ataboev, O.; Terukov, E.; and Matchanov, N.
"HETEROJUNCTION THIN-FILM SOLAR CELL BASED ON
Euroasian Journal of Semiconductors Science and Engineering: Vol. 2:
5, Article 15.
Available at: https://uzjournals.edu.uz/semiconductors/vol2/iss5/15