Euroasian Journal of Semiconductors Science and Engineering
Article Title
Abstract
А scheme of a compact speckle interferometer - shearograph for digital shearography was designed and developed. A software algorithm for obtaining of shearograms was implemented. The device can be used for evaluation of deformation, in particular, for inspection of hermetic seals of microelectronic packages.
Recommended Citation
Azamatov, Zakir Tahirovich; Kim, Valeriy; and Yoldoshev, Murod Akbarali ugli
(2020)
"COMPACT SPECKLE INTERFEROMETER FOR DIGITAL SHEAROGRAPHY,"
Euroasian Journal of Semiconductors Science and Engineering: Vol. 2
:
Iss.
4
, Article 8.
Available at:
https://uzjournals.edu.uz/semiconductors/vol2/iss4/8
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