А scheme of a compact speckle interferometer - shearograph for digital shearography was designed and developed. A software algorithm for obtaining of shearograms was implemented. The device can be used for evaluation of deformation, in particular, for inspection of hermetic seals of microelectronic packages.
Azamatov, Zakir Tahirovich; Kim, Valeriy; and Yoldoshev, Murod Akbarali ugli
"COMPACT SPECKLE INTERFEROMETER FOR DIGITAL SHEAROGRAPHY,"
Euroasian Journal of Semiconductors Science and Engineering: Vol. 2
, Article 8.
Available at: https://uzjournals.edu.uz/semiconductors/vol2/iss4/8