The results of studying the effect of substrate temperature and evaporation rate on the kinetic coefficients and strain sensitivity of Bi2-xSbxTe3 films obtained by thermal evaporation in vacuum are presented.
Onarkulov, M.; Nasriddinov, S.; Yuldashev, Sh.; and Yunusaliev, L.
"TECHNOLOGICAL FEATURES OF OBTAINING STRENGTH SENSITIVE POLYCRYSTALLINE FILMS Bi2-XSbXTe3,"
Euroasian Journal of Semiconductors Science and Engineering: Vol. 2
, Article 10.
Available at: https://uzjournals.edu.uz/semiconductors/vol2/iss3/10