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Euroasian Journal of Semiconductors Science and Engineering

Euroasian Journal of Semiconductors Science and Engineering

Abstract

The design features of a thermoanemometric sensor based on silicon with nanoclusters of Nickel atoms, which has high sensitivity and stability of output parameters, are considered. Their electrophysical parameters are studied depending on the type of continuous media.

References

1. King L.V. On the convection of heat from small cylinders in a stream fluid determination of the convection constants of small platinum wires with application to the hot-wire anemometry. Phil. Trans. Roy. Soc. London, A.214, 1914, pp.393-432. 2. Morozov-Rostovskii G.P. Termoanemometricheskie plenochnye preobrazovateli[Thermal Anemometers Transducers], Izmeritel'naya tekhnika[Measuring Equipment]. 1968, no. 5, p. 99. (In Russ.) 3. Ferenets V.A. Poluprovodnikovye struinye termoanemometry[Semiconductor Jet Hot-wire Anemometers]. Moscow, Publ. Energiya, 1972, p. 113. (In Russ.) 4. Koryakova O.N., Kuz'min V.A. Termoanemometry postoyannoi temperatury: "Izmeriteli raskhoda zhidkosti, gaza, para" [Thermoanemometers of Constant Temperature: "Meters of the Flow Rate of Liquid, Gas, Steam"], Moscow, 1973, pp. 56-59. (In Russ.) 5. habr.com›ru/company/efo/blog/280031/ 6.Sh.B.Utamuradova, Sh.X.Daliev, S.S.Nasriddinov, Sh.A.Ismoilov, D.M.Esbergenov.Hot-Film Sensors based on Silicon with Nanoclusters of Nickel Atoms to Determine the Speed Gas Flow.Journal of Scientific and Engineering Research, 2019, 6(9), pp. 70-75.

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