The possibility of detection of defects in silicon wafers by Fourier analysis of digital images obtained by laser introscopy is shown.
Azamatov, Zakirjan T.; Kulagin, Ilya A.; Abdurakhmanov, Kakhkhor P.; and N.A. Akbarova, Nigora A.
"LASER TESTING OF SILICON WAFERS,"
Euroasian Journal of Semiconductors Science and Engineering: Vol. 1
, Article 48.
Available at: https://uzjournals.edu.uz/semiconductors/vol1/iss1/48