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Scientific reports of Bukhara State University

Abstract

The article presents the results of the study of heat-resistant diode structures with a Schottky barrier Au-ZrBx-n-SiC 6H. Fast thermal annealing at T = 1000 ° C for 90 seconds in vacuum showed that the ZrBx-n-SiC 6H interface remains sharp while retaining the barrier properties of the diode structures

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References

1. Chelnokov P.A., Chelnokov V.E. Poluprovodnikoviy karbid kremniya - texnologiya i pribori //FTP. - 1995. - №11. - S. 1921-1943. 2. Lebedev A.A., Chelnokov V.E. Shirokozonnie poluprovodniki dlya silovoy elektroniki //FTP. - 1993. - №9. - S.1096-1099. 3. Pecz B. Contact formation in SiC devices. //Appl. Surf. Sci., 2001. 153. - P. 1-8. 4. Sankin V.I., Lebedev A.A., Kuznetsov A.N., Lepneva A.A., Savkina N.S. Osobennosti vertikalnix karbid-kremnievix priborov //Trudi III Mejdunarodnogo seminara «Kar-bid kremniya i rodstvennie materiali». - Velikiy Novgorod: NovGU, 2000. - S. 195-201. 5. Afanasev A.V., Ilin V.A., Petrov A.A. Bareri Shottki k karbidu kremniya. Teoreticheskie i eksperimentalnie issledovaniya v shirokom intervale temperatur //Trudi III Mejdunarodnogo seminara «Karbid kremniya i rodstvennie materiali». - Velikiy Novgorod: Nov GU, 2000. - S. 202-205. 6. Poter L.M., Davis R.F. A critical review of ohmic and rectifying contacts for silicon carbide //Materials Scienceand Engineering, 1995. B 34. – P. 83-105. 7. Lee S.K., Zetterling C.M., Ostling M. Schottky diode formation and characterization of titanium tungsten to n-and p-type 4H silicon carbide //J.Appl. Phys., 2000. 87. – N11. – P. 8039-8044. 8. Boltovets N.S. et al. Microwave diodes with contact metallization systems based on silicides, nitrides, and borides of refractory metals //SPQEO, 2000. 3. - №3. – P. 359-370. 9. Vassilevski K.V., Dmitriev V.A., Zorenko A.V. Silicon carbide diode operating at avalanche breakdown current density of 60 kA/cm2. //J. Appl. Phys, 1993. 74. - N12. – P. 77612-7614.

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