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Scientific reports of Bukhara State University

Article Title

HEAT-RESISTANT AU-ZRBX–N-SIC 6H SCHOTTKY BARRIERS

Abstract

The article presents the results of the study of heat-resistant diode structures with a Schottky barrier Au-ZrBx-n-SiC 6H. Fast thermal annealing at T = 1000 ° C for 90 seconds in vacuum showed that the ZrBx-n-SiC 6H interface remains sharp while retaining the barrier properties of the diode structures